Constant Angle of Incidence Contours for an Air-SiO2-Si System

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The ellipsometric function for an ambient-film-substrate system is defined as the ratio of complex-amplitude reflection coefficients for the and polarization:

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The figure shows such a family of non-intersecting, constant angle of incidence contours (CAIC) for (normal incidence) to (grazing incidence) for the system at .

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Contributed by: Siva Perla (March 2011)
Open content licensed under CC BY-NC-SA


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R. M. A. Azzam and N. M. Bashara, "Reflection and Transmission of Polarized Light by Stratified Planar Structures," Ellipsometry and Polarized Light, Amsterdam: North Holland, 2003 pp. 292.



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